Table 1.
Parameters | Value (MEMS) | Standard industrial acceleration sensor |
---|---|---|
Range | ±6 g | 80 g |
Operating temperature range | −40–85 °C | −50–120 |
Sensitivity | 819 counts/g | 100 mV/g |
Sensitivity variation from RT over temp | −2–+2% | ±5% |
Resolution | 1.22 mg | 200 μg |
Non-linearity | 1% | ≤1 |
Noise density (on filter pins) | 175 μg/√Hz | 20 μg/√Hz |
Cost | ≒ 50 USD | ≒ 300 USD |