Table 1.

Testing results of resonant frequency and quality factor.

Temperature (°C)	Drive Mode		Sense Mode
	Resonant frequency(Hz)	Quality factor	Resonant frequency(Hz)	Quality factor
−40	2,475.35	19,041	2,426.30	16,175
−30	2,474.86	17,678	2,426.20	15,164
−20	2,474.35	16,495	2,426.10	14,271
−10	2,473.50	15,459	2,425.65	13,476
0	2,473.02	13,739	2,425.16	12,126
10	2,472.30	10,749	2,424.85	11,022
20	2,471.60	9,886	2,424.30	9,697
30	2,470.20	8,822	2,423.80	8,097
40	2,469.40	8,232	2,424.10	6,925
50	2,468.90	7,482	2,423.70	6,215
60	2,468.30	7,052	2,422.90	6,057