Figure 3.
The angular dependence of the etching rate calculated using interpolation formulas with three (a), four (b) and thirteen (c) interpolation parameters (for 30% etchant concentration) listed in Table 1.
The angular dependence of the etching rate calculated using interpolation formulas with three (a), four (b) and thirteen (c) interpolation parameters (for 30% etchant concentration) listed in Table 1.