Table 1.

Recipes for the sensor fabrication process.

Plasma	Gas	Compressed dry air
	Flow rate	45 slm
	Power	350 W/20 kHz
	Stage moving speed	10 mm/s in x-direction
	Stage moving pitch	2 mm in y-direction
Inkjet printing	Firing voltage	28 V
	Drop space	30 μm
	Jetting frequency	1 kHz
	Substrate temperature	60 °C
	Cartridge print height	1 mm
ZnO anneal
Nano-silver curing	Oven Vacuum	6.7×10−2 Pa
	Temperature	200 °C
	Time	30 min.