U11	U22	U33	U12	U13	U23
O1	0.0583 (15)	0.0628 (17)	0.0461 (14)	0.0085 (13)	0.0098 (12)	−0.0074 (12)
O2	0.0457 (13)	0.0436 (13)	0.0695 (15)	−0.0059 (11)	0.0167 (12)	0.0008 (12)
O3	0.0698 (18)	0.077 (2)	0.0795 (18)	0.0295 (17)	0.0199 (15)	−0.0057 (16)
O4	0.127 (3)	0.0594 (17)	0.0620 (17)	−0.0228 (17)	0.0460 (17)	−0.0118 (14)
O5	0.0844 (19)	0.0737 (18)	0.0501 (15)	0.0090 (16)	0.0004 (14)	−0.0174 (14)
N1	0.0429 (15)	0.0467 (16)	0.0466 (16)	0.0038 (14)	0.0095 (13)	−0.0067 (14)
N2	0.078 (2)	0.0510 (18)	0.0569 (19)	−0.0101 (16)	0.0347 (17)	−0.0146 (15)
N3	0.0624 (19)	0.0521 (19)	0.0624 (19)	0.0094 (16)	0.0140 (16)	−0.0056 (16)
N4	0.107 (3)	0.116 (4)	0.056 (2)	0.025 (3)	0.027 (2)	−0.015 (2)
N5	0.0486 (16)	0.0409 (16)	0.0509 (16)	0.0013 (13)	0.0077 (13)	−0.0074 (13)
C1	0.0418 (19)	0.0470 (19)	0.0424 (19)	−0.0020 (16)	0.0107 (16)	−0.0030 (15)
C2	0.053 (2)	0.046 (2)	0.062 (2)	0.0042 (19)	0.0190 (19)	−0.0042 (18)
C3	0.057 (2)	0.047 (2)	0.053 (2)	0.0019 (18)	0.0218 (18)	−0.0087 (17)
C4	0.080 (3)	0.051 (2)	0.058 (2)	−0.008 (2)	0.031 (2)	−0.013 (2)
C5	0.071 (3)	0.056 (2)	0.071 (3)	−0.014 (2)	0.037 (2)	−0.018 (2)
C6	0.059 (2)	0.065 (3)	0.093 (3)	0.000 (2)	0.026 (2)	−0.021 (3)
C7	0.054 (2)	0.056 (2)	0.054 (2)	0.0060 (19)	0.0054 (18)	−0.0090 (18)
C8	0.069 (3)	0.064 (3)	0.061 (2)	0.001 (2)	0.016 (2)	0.004 (2)
C9	0.061 (2)	0.082 (3)	0.047 (2)	0.008 (2)	0.012 (2)	−0.001 (2)
C10	0.095 (3)	0.109 (4)	0.054 (3)	0.013 (3)	0.022 (3)	0.004 (3)
C11	0.073 (3)	0.093 (4)	0.047 (2)	0.014 (3)	0.005 (2)	−0.017 (2)
C12	0.053 (2)	0.070 (3)	0.044 (2)	0.005 (2)	0.0044 (18)	−0.014 (2)
C13	0.051 (2)	0.053 (2)	0.051 (2)	0.0027 (18)	0.0046 (17)	−0.0153 (18)
C14	0.0437 (19)	0.052 (2)	0.049 (2)	−0.0028 (17)	0.0092 (16)	−0.0082 (17)
C15	0.060 (2)	0.048 (2)	0.058 (2)	−0.0043 (18)	0.0192 (19)	−0.0085 (18)
C16	0.071 (3)	0.064 (3)	0.060 (2)	0.005 (2)	0.013 (2)	−0.012 (2)
C17	0.100 (3)	0.059 (3)	0.081 (3)	0.017 (2)	0.007 (3)	−0.021 (2)
C18	0.094 (3)	0.094 (4)	0.056 (3)	0.025 (3)	0.005 (2)	−0.033 (3)
C19	0.091 (3)	0.070 (3)	0.100 (3)	0.023 (3)	0.006 (3)	0.006 (3)
C20	0.083 (3)	0.067 (3)	0.074 (3)	−0.011 (2)	0.036 (2)	−0.003 (2)
C21	0.0438 (19)	0.050 (2)	0.053 (2)	0.0042 (17)	0.0063 (16)	−0.0035 (17)
C22	0.047 (2)	0.051 (2)	0.052 (2)	0.0033 (17)	0.0077 (17)	−0.0039 (17)
C23	0.0468 (19)	0.0442 (18)	0.050 (2)	0.0003 (16)	0.0123 (16)	−0.0009 (16)
C24	0.068 (3)	0.049 (2)	0.070 (2)	0.009 (2)	0.003 (2)	0.001 (2)
C25	0.085 (3)	0.056 (2)	0.089 (3)	0.018 (2)	0.003 (2)	−0.012 (2)
C26	0.059 (2)	0.047 (2)	0.070 (2)	0.0059 (19)	0.021 (2)	−0.0106 (19)
C27	0.072 (3)	0.068 (3)	0.053 (2)	0.023 (2)	0.007 (2)	0.002 (2)
C28	0.067 (3)	0.050 (2)	0.046 (2)	0.0169 (19)	0.0103 (19)	0.0089 (18)
C29	0.093 (3)	0.065 (3)	0.058 (2)	0.014 (3)	0.028 (2)	−0.003 (2)
C30	0.116 (4)	0.075 (3)	0.081 (3)	0.034 (3)	0.049 (3)	0.013 (3)
C31	0.085 (3)	0.084 (4)	0.117 (4)	0.019 (3)	0.044 (3)	0.031 (3)
C32	0.091 (4)	0.070 (3)	0.094 (3)	0.001 (3)	0.015 (3)	0.003 (3)
C33	0.086 (3)	0.055 (3)	0.060 (2)	0.010 (2)	0.022 (2)	−0.001 (2)