U11	U22	U33	U12	U13	U23
O1	0.0796 (11)	0.0708 (10)	0.0986 (12)	0.0224 (8)	0.0536 (9)	0.0295 (9)
C1	0.0532 (11)	0.0469 (10)	0.0603 (11)	−0.0023 (8)	0.0247 (9)	−0.0035 (9)
O2	0.0730 (10)	0.0971 (12)	0.0823 (11)	0.0283 (8)	0.0465 (8)	0.0295 (9)
C2	0.0632 (12)	0.0525 (10)	0.0581 (11)	0.0013 (9)	0.0287 (9)	−0.0044 (9)
O3	0.0667 (9)	0.0895 (11)	0.0631 (9)	0.0218 (7)	0.0292 (7)	0.0171 (8)
C3	0.0904 (17)	0.0689 (14)	0.0751 (14)	−0.0069 (12)	0.0413 (13)	0.0071 (11)
C4	0.0878 (19)	0.0886 (17)	0.103 (2)	−0.0228 (14)	0.0550 (16)	0.0040 (15)
C5	0.0574 (13)	0.0915 (18)	0.121 (2)	−0.0166 (12)	0.0426 (14)	−0.0042 (17)
C6	0.0533 (12)	0.0671 (13)	0.0882 (15)	−0.0044 (10)	0.0244 (11)	0.0036 (11)
C7	0.0532 (11)	0.0563 (11)	0.0562 (11)	0.0063 (9)	0.0231 (9)	0.0015 (9)
C8	0.0963 (18)	0.126 (2)	0.0663 (14)	0.0422 (16)	0.0362 (13)	0.0282 (15)
N1	0.0785 (12)	0.0605 (10)	0.0678 (11)	−0.0008 (9)	0.0373 (9)	0.0010 (9)
C11	0.0683 (12)	0.0470 (10)	0.0550 (11)	−0.0013 (9)	0.0272 (9)	−0.0049 (8)
C9	0.054 (3)	0.076 (3)	0.060 (3)	0.003 (2)	0.022 (2)	−0.001 (2)
C10	0.059 (3)	0.067 (3)	0.059 (3)	0.013 (2)	0.022 (2)	0.018 (2)
C12'	0.072 (3)	0.042 (2)	0.055 (3)	−0.005 (2)	0.028 (2)	−0.010 (2)
C13'	0.083 (3)	0.043 (2)	0.054 (3)	−0.012 (2)	0.026 (3)	−0.002 (2)