U11	U22	U33	U12	U13	U23
S1	0.02002 (15)	0.01758 (16)	0.02402 (17)	0.00250 (12)	0.01091 (12)	0.00250 (12)
O1	0.0221 (4)	0.0132 (4)	0.0194 (4)	−0.0009 (3)	0.0005 (3)	−0.0023 (3)
N1	0.0165 (5)	0.0138 (5)	0.0194 (5)	−0.0013 (4)	0.0066 (4)	0.0001 (4)
N2	0.0172 (5)	0.0121 (5)	0.0197 (5)	0.0011 (4)	0.0070 (4)	0.0016 (4)
N3	0.0160 (5)	0.0194 (6)	0.0208 (5)	0.0001 (4)	0.0048 (4)	0.0000 (4)
N4	0.0191 (5)	0.0181 (6)	0.0301 (6)	0.0044 (4)	0.0119 (5)	0.0068 (5)
C1	0.0161 (6)	0.0240 (7)	0.0258 (7)	0.0004 (5)	0.0072 (5)	−0.0014 (5)
C2	0.0230 (6)	0.0245 (7)	0.0236 (6)	−0.0037 (5)	0.0114 (5)	−0.0013 (5)
C3	0.0248 (6)	0.0207 (6)	0.0180 (6)	−0.0025 (5)	0.0054 (5)	0.0018 (5)
C4	0.0179 (6)	0.0186 (6)	0.0193 (6)	−0.0007 (5)	0.0032 (4)	0.0007 (5)
C5	0.0165 (5)	0.0145 (6)	0.0171 (5)	−0.0017 (4)	0.0046 (4)	−0.0023 (4)
C6	0.0158 (5)	0.0136 (6)	0.0165 (5)	−0.0012 (4)	0.0036 (4)	−0.0016 (4)
C7	0.0158 (5)	0.0145 (6)	0.0179 (6)	0.0005 (4)	0.0032 (4)	0.0004 (5)
C8	0.0159 (5)	0.0125 (6)	0.0162 (5)	0.0012 (4)	0.0044 (4)	0.0006 (4)
C9	0.0143 (5)	0.0130 (6)	0.0163 (5)	−0.0002 (4)	0.0055 (4)	0.0007 (4)
C10	0.0152 (5)	0.0139 (6)	0.0206 (6)	0.0023 (4)	0.0033 (4)	0.0012 (5)
C11	0.0158 (5)	0.0168 (6)	0.0193 (6)	0.0013 (5)	0.0001 (4)	−0.0005 (5)
C12	0.0165 (5)	0.0141 (6)	0.0181 (6)	−0.0021 (4)	0.0059 (4)	−0.0010 (5)
C13	0.0209 (6)	0.0129 (6)	0.0204 (6)	0.0020 (5)	0.0026 (5)	0.0025 (5)
C14	0.0207 (6)	0.0161 (6)	0.0154 (5)	0.0008 (5)	0.0005 (4)	0.0022 (5)
C15	0.0161 (5)	0.0129 (6)	0.0188 (6)	−0.0004 (4)	0.0043 (4)	−0.0032 (4)
C16	0.0219 (6)	0.0227 (7)	0.0254 (7)	−0.0008 (5)	−0.0027 (5)	−0.0057 (5)
C17	0.0315 (7)	0.0262 (8)	0.0311 (8)	−0.0015 (6)	0.0010 (6)	−0.0125 (6)