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. Author manuscript; available in PMC: 2013 Jan 1.
Published in final edited form as: Sens Actuators A Phys. 2012 Jan;173(1):254–266. doi: 10.1016/j.sna.2011.09.009

Table 5.

Dynamic errors and accuracies.

@ 8 Hz @ 10 Hz @ 12 Hz
Dynamic RMSE (μm) 1.1±0.03 1.12±0.02 1.28±0.03
Dynamic RMS Accuracy (%) 98.9 98.88 98.72