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AFM data from patterning experiments with HDT-SAMs on Au/glass substrates exposing a 30 nm thick Au layer. The structures were fabricated by using single laser pulses at P = 24.3 mW and with distinct τ of 50 µs (left) and 100 µs (right). Pattern transfer to the Au layer was carried out by wet-chemical etching. Diameters refer to values at half-depth.
