Table 1. Summary of the mobility and CNP change of CVD-G devices from the annealing treatment.
Field effect mobility (cm2/(V s)) | Charge Neutral point (V) | |||
---|---|---|---|---|
Device No. | Before | After | Before | After |
1 | 1370 | 1090 | 20 | 6 |
2 | 1510 | 840 | 22.5 | 6.2 |
3 | 1040 | 40 | 26 | 11 |
4 | 1690 | 1640 | 24 | 13 |
5 | 1370 | 1250 | 27 | 4.8 |
6 | 900 | 2400 | 18 | −0.5 |