Table 3.
Parameter sensitivity analysis
Parameter | Sensitivity |
---|---|
L1 | 1.224% |
Ll | −0.785% |
L2 | 1.309% |
R1 | −5.109% |
ΔR | 1.108% |
ΔP* | 1.128% |
Lpnj* | −1.432% |
L*p2 | 0.695% |
ϕI | 0.048% |
L*p1 | 0.320% |
K*p1 | 0.928% |
γ1(−) | −3.729% |
γ2 | −1.824% |
f1(−) | 0.516% |
f2 | −1.249% |
D*1 | 0.600% |
D*2z | −0.715% |
Cth | −3.138% |
μ | −1.566% |
t0 | −0.083% |
The (−) after γ1 and f1 means they are decreased by 10%, all others are increased by 10%, e.g., increased L1 by 10%, the spot size, normalized by R1, at 4 min is increased by 1.224%.