| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0454 (4) | 0.0807 (7) | 0.0762 (6) | −0.0194 (4) | 0.0274 (4) | −0.0311 (5) |
| Cl2 | 0.0780 (7) | 0.0882 (8) | 0.0780 (6) | 0.0331 (6) | 0.0310 (5) | 0.0324 (6) |
| S1 | 0.0355 (3) | 0.0382 (4) | 0.0259 (3) | −0.0025 (3) | 0.0048 (2) | −0.0050 (3) |
| O1 | 0.0316 (10) | 0.0547 (13) | 0.0402 (10) | −0.0033 (9) | −0.0006 (8) | −0.0019 (9) |
| O2 | 0.0582 (13) | 0.0452 (12) | 0.0332 (10) | −0.0025 (10) | 0.0124 (9) | −0.0114 (9) |
| O3 | 0.0569 (12) | 0.0388 (11) | 0.0303 (9) | −0.0066 (10) | 0.0160 (9) | −0.0086 (8) |
| O4 | 0.0440 (11) | 0.0395 (11) | 0.0358 (10) | −0.0041 (9) | 0.0102 (8) | −0.0087 (8) |
| N1 | 0.0342 (11) | 0.0379 (12) | 0.0265 (10) | −0.0022 (10) | 0.0100 (9) | −0.0041 (9) |
| C1 | 0.0311 (13) | 0.0375 (15) | 0.0310 (13) | −0.0010 (11) | 0.0082 (10) | −0.0024 (11) |
| C2 | 0.0414 (15) | 0.0378 (15) | 0.0399 (15) | −0.0015 (12) | 0.0108 (12) | −0.0062 (12) |
| C3 | 0.0529 (18) | 0.0349 (16) | 0.0515 (17) | 0.0000 (13) | 0.0178 (14) | 0.0047 (13) |
| C4 | 0.0578 (19) | 0.0464 (18) | 0.0389 (15) | −0.0002 (15) | 0.0146 (14) | 0.0081 (13) |
| C5 | 0.0469 (16) | 0.0474 (17) | 0.0304 (13) | −0.0005 (13) | 0.0117 (12) | −0.0024 (12) |
| C6 | 0.0305 (12) | 0.0366 (14) | 0.0276 (11) | −0.0021 (11) | 0.0092 (10) | −0.0020 (11) |
| C7 | 0.0281 (12) | 0.0398 (15) | 0.0290 (12) | −0.0016 (11) | 0.0088 (10) | −0.0074 (11) |
| C8 | 0.0276 (12) | 0.0380 (14) | 0.0246 (11) | −0.0008 (11) | 0.0066 (9) | −0.0035 (10) |
| C9 | 0.0274 (12) | 0.0388 (15) | 0.0337 (13) | −0.0021 (11) | 0.0103 (10) | −0.0028 (11) |
| C10 | 0.0379 (14) | 0.0354 (14) | 0.0349 (13) | 0.0042 (12) | 0.0140 (11) | 0.0028 (11) |
| C11 | 0.0391 (15) | 0.0417 (16) | 0.0387 (14) | 0.0041 (12) | 0.0119 (12) | 0.0034 (12) |
| C12 | 0.0454 (16) | 0.0536 (19) | 0.0365 (15) | 0.0096 (14) | 0.0102 (13) | 0.0026 (13) |
| C13 | 0.062 (2) | 0.0496 (19) | 0.0413 (16) | 0.0147 (16) | 0.0226 (15) | 0.0116 (14) |
| C14 | 0.067 (2) | 0.0375 (17) | 0.0579 (19) | 0.0017 (15) | 0.0351 (17) | 0.0071 (14) |
| C15 | 0.0504 (17) | 0.0423 (17) | 0.0449 (16) | −0.0002 (13) | 0.0206 (14) | −0.0016 (13) |
| C16 | 0.0365 (14) | 0.0490 (17) | 0.0306 (13) | −0.0006 (12) | 0.0156 (11) | −0.0037 (12) |
| C17 | 0.0292 (13) | 0.0628 (19) | 0.0296 (13) | 0.0001 (13) | 0.0138 (11) | −0.0029 (12) |
| C18 | 0.0313 (14) | 0.079 (2) | 0.0444 (16) | −0.0037 (15) | 0.0190 (13) | −0.0138 (16) |
| C19 | 0.0351 (17) | 0.119 (4) | 0.0399 (18) | −0.002 (2) | 0.0073 (14) | −0.013 (2) |
| C20 | 0.0389 (18) | 0.124 (4) | 0.0366 (17) | 0.018 (2) | 0.0057 (14) | 0.015 (2) |
| C21 | 0.0395 (16) | 0.088 (3) | 0.0434 (17) | 0.0170 (17) | 0.0171 (14) | 0.0127 (17) |
| C22 | 0.0343 (14) | 0.065 (2) | 0.0340 (14) | 0.0068 (14) | 0.0142 (12) | 0.0029 (13) |
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