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The pH sensitivity and linearity of ISFETs and REFETs measured by a HP 4156C with VDS at 0.5 V and 2.5 V.
| VDS = 0.5 V | VDS = 2.5 V | |||
|---|---|---|---|---|
| Sensitivity (mV/pH) | Linearity (%) | Sensitivity (mV/pH) | Linearity (%) | |
| ISFET | 46.7 | 99.9 | 48.2 | 99.9 |
| REFET(60 wt.%-DNP) | 22.9 | 97.7 | 12.3 | 99.7 |
