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Comparison between analytical and simulation results for uniform width rectangular and trapezoidal cantilevers.
| Model | Max. Deflection (μm) | Frequency (kHz) | ||
|---|---|---|---|---|
| Analytical | Simulation | Analytical | Simulation | |
| #1 | 0.28 | 0.28 | 4.79 | 4.91 |
| #4 | 0.43 | 0.44 | 5.59 | 5.33 |
