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. 2009 Apr 1;9(4):2389–2414. doi: 10.3390/s90402389

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© 2009 by the authors; licensee MDPI, Basel, Switzerland

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 16. — Displacement profile of the 3-DoF micromachined vibratory gyroscope excited by a sinusoidal voltage of 0.5V amplitude and a frequency of 1.77 kHz. Due to mechanical amplification, the passive mass m_f + m₂ (blue) achieves a displacement of 4.07μm keeping the active mass m₁ (yellow) at a displacement of 1.5 μm.