Table 2.
A comparison of the proposed gyroscope with some existing models developed by Alper et al. [26] and Acar et al. [27].
| Institute/University | METU | UCI | PIEAS/GIKI |
|---|---|---|---|
| Type | Resonant | Non-resonant | Non-resonant |
| Material | Nickel | Polysilicon | Nickel |
| Fabrication Process | DRIE | DRIE | MetalMUMPs |
| Size | 2.9 × 2.9 mm2 | 4.0 × 4.0 mm2 | 2.2 × 2.6 mm2 |
| Structural layer thickness | 18 μm | 100 μm | 20 μm |
| Operating Frequency | 4090 Hz | 752 Hz | 3540 Hz |
| Applied Voltage | Not available | 25VDC +3VAC | 0.5VAC |
| Drive Displacement | 10 μm | 5.8 μm | 4.1 μm |