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. 2012 Mar 23;12(4):3789–3797. doi: 10.3390/s120403789

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© 2012 by the authors; licensee MDPI, Basel, Switzerland

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 3. — Simulation results: Total displacement in the substrate for the SAW resonator with SU-8 pillars of height (a) h = 0 μm (no pillar), (b) h = 10 μm, (c) h = 12 μm, (d) h = 23 μm, (e) h = 34 μm, and (f) h = 36 μm. The resonance mode of the pillar of different heights can be observed from the total displacement profile and deformation pattern of the pillars. For simplicity substrate depth up to 2λ along x₃ is shown. In order to have a better visualization, the original deformation value is magnified 100 times and shown in the figure.

Figure 3. — Simulation results: Total displacement in the substrate for the SAW resonator with SU-8 pillars of height (a) h = 0 μm (no pillar), (b) h = 10 μm, (c) h = 12 μm, (d) h = 23 μm, (e) h = 34 μm, and (f) h = 36 μm. The resonance mode of the pillar of different heights can be observed from the total displacement profile and deformation pattern of the pillars. For simplicity substrate depth up to 2λ along x₃ is shown. In order to have a better visualization, the original deformation value is magnified 100 times and shown in the figure.