Table 2.

Shrinkage effect of curing process.

			Soft-baked		Hard-baked
Spin speed [rpm]	Description	Design dimensions [μm]	Fabrication dimensions [μm]	Shrinkage/expansion effect compared to design dimensions [%]	Fabrication dimensions [μm]	Shrinkage/expansion effect compared to design dimensions [%]	Shrinkage/expansion effect compared to fabrication dimensions in soft-baked [%]
1000	Top face	50	50.3	0.6	40.4	−19.2	−19.7
	Bottom face		64.5	29.0	53.4	6.8	−17.2
2000	Top face	25	24.8	−0.8	19.8	−20.8	−20.2
	Bottom face		30.7	22.8	25.9	3.6	−15.6
4000 (gap)	Top face	20	20.6	3.0	23.9	19.5	16.0
	Bottom face		17.3	−13.5	19.1	−4.5	10.4
4000 (circle)	Top face	10	9.8	−2.0	11.2	12.0	14.3
	Bottom face		7.3	−27.0	6.3	−37.0	−13.7