Table 3.
Dimensions of the fabricated photosensitive-polyimide-based multichannel neural electrodes.
| Description | ECoG electrode | Mesh intracortical electrode | Guide cnnula electrode | |||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Design dimensions [μm] | Fabrication dimensions [μm] | Shrinkage/expansion effect compared to design dimensions [%] | Design dimensions [μm] | Fabrication dimensions [μm] | Shrinkage/expansion effect compared to design dimensions [%] | Design dimensions [μm] | Fabrication dimensions [μm] | Shrinkage/expansion effect compared to design dimensions [%] | ||
| Number of recording microelectrodes | 16 | 16 | − | 5 | 5 | − | − | − | − | |
| Diameter of recording microelectrode | 100 | 108.5 ± 1.5 | 8.5 | 40 | 43.7 ± 0.1 | 9.3 | ||||
| Pitch of recording microelectrode site | 500 (dorso-ventral) | 487.6 ± 1.3 | −2.5 | 80 | 74.5 ± 0.6 | −6.9 | ||||
| 700 (rostral-caudal) | 685.7 ± 1.6 | −2.0 | ||||||||
| Interconnection line | 25 | 24.9 ± 0.8 | −0.4 | 15 (mesh area) | 10.3 ± 1.2 | −31.3 | − | − | − | |
| 15 (probe area) | 14.3 ± 0.3 | −4.7 | ||||||||
| Minimum space between interconnection lines | 25 | 24.5 ± 0.6 | −2.0 | 35 (mesh area) | 39.8 ± 0.9 | 13.7 | − | − | − | |
| 35 (probe area) | 34.5 ± 0.4 | −1.4 | ||||||||
| Probe width | 1500 | 1499.50 | 0.0 | 310 | 321.7 ± 0.7 | 3.8 | − | − | − | |
| Insulated probe widthin mesh area | − | − | − | 30 (the most left side) | 28.8 ± 0.6 | −4.0 | − | − | − | |
| 30 (mesh area) | 22.6 ± 0.6 | −24.7 | ||||||||
| Minimum space between insulated probes in mesh area | − | − | − | 20 | 27.8 ± 0.7 | 39.0 | − | − | − | |
| Length of short-side of through-holes | 110 | 116.4 ± 2.3 | 5.8 | − | − | − | − | − | − | |
| Length of long-side of through-holes | 300 | 307.5 ± 4.7 | 2.5 | − | − | − | − | − | − | |