Table 1.

Fabrication tolerances with respect to Γ_c for several technological parameters in case of absorption sensing schemes.

g [nm]	Γc [%]	Ψϑ [%/°]	Ψt2 [%/nm]	Ψtox [%/nm]	Ψtair [%/nm]
120	49.41	−1.0220	−0.2648	−0.4922	−0.0231
140	49.29	−0.8721	−0.2587	−0.4173	−0.0237
160	49.00	−0.7534	−0.2493	−0.3601	−0.0240
180	48.48	−0.6442	−0.2374	−0.3149	−0.0249
200	47.98	−0.5555	−0.2255	−0.2781	−0.0250
220	47.35	−0.4661	−0.2134	−0.2474	−0.0312