Table 2.

Fabrication tolerances with respect to S for several technological parameters in case of homogeneous sensing schemes.

g [nm]	S	Ψϑ [deg−1]	Ψt2 [nm−1]	Ψtox [nm−1]	Ψtair [nm−1]
120	0.7984	−0.009203	−0.00612	−0.009356	−0.001310
140	0.7847	−0.006600	−0.00598	−0.008005	−0.001324
160	0.7718	−0.004752	−0.00587	−0.007005	−0.001339
180	0.7574	−0.003084	−0.00573	−0.006230	−0.001348
200	0.7432	−0.001650	−0.00557	−0.005613	−0.001369
220	0.7294	−0.000360	−0.00542	−0.005108	−0.001387