Table 3.
Fabrication tolerances for S (homogeneous sensing) and Γc (absorption sensing) for all considered technological parameters (Ψϑ calculated with ϑmax = 6°).
| Ψϑ | Ψt2 | Ψtox | Ψtair | ||
|---|---|---|---|---|---|
| S | 0.91745 | −0.0077 deg−1 | −0.0064 nm−1 | −0.0099 nm−1 | −0.000687 nm−1 |
| Γc | 0.61775 | −2.78 %/° | −0.35 %/nm | −0.69 %/nm | −0.047 %/nm |