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. 2010 Feb 23;18(5):4790–4795. doi: 10.1364/OE.18.004790

Fig. 2.

Fig. 2

Integrated filter fabrication by lift-off, a) deposition of filter films, b) patterning of SU-8, c) development of PMGI, d) deposition of broadband films, e) lift-off process, f) patterning of solid-core rib waveguide.