U11	U22	U33	U12	U13	U23
C1	0.0526 (19)	0.0305 (15)	0.0392 (17)	0.0225 (17)	0.0274 (16)	0.0189 (13)
F1	0.0628 (11)	0.0390 (9)	0.0698 (12)	0.0205 (8)	0.0142 (9)	0.0304 (9)
C1A	0.0526 (19)	0.0305 (15)	0.0392 (17)	0.0225 (17)	0.0274 (16)	0.0189 (13)
F1A	0.0628 (11)	0.0390 (9)	0.0698 (12)	0.0205 (8)	0.0142 (9)	0.0304 (9)
C2	0.0596 (13)	0.0248 (9)	0.0333 (10)	0.0188 (9)	0.0280 (10)	0.0119 (8)
C3	0.0340 (10)	0.0181 (8)	0.0221 (8)	0.0079 (7)	0.0098 (7)	0.0057 (7)
C4	0.0469 (11)	0.0229 (9)	0.0271 (9)	0.0100 (8)	0.0203 (8)	0.0114 (7)
C5	0.0380 (10)	0.0247 (9)	0.0220 (9)	0.0098 (7)	0.0151 (8)	0.0068 (7)
C6	0.0266 (9)	0.0197 (8)	0.0159 (8)	0.0058 (7)	0.0038 (7)	0.0048 (6)
C7	0.0355 (10)	0.0225 (8)	0.0239 (9)	0.0055 (7)	0.0131 (7)	0.0097 (7)
C8	0.0378 (10)	0.0253 (9)	0.0225 (9)	0.0104 (7)	0.0160 (8)	0.0075 (7)
C9	0.0376 (10)	0.0228 (9)	0.0176 (8)	0.0094 (7)	0.0076 (7)	0.0059 (7)
C10	0.0196 (8)	0.0163 (7)	0.0229 (8)	0.0034 (6)	0.0071 (7)	0.0057 (7)
C11	0.0197 (8)	0.0184 (8)	0.0220 (8)	0.0052 (6)	0.0076 (6)	0.0095 (7)
C12	0.0212 (8)	0.0206 (8)	0.0207 (8)	0.0056 (6)	0.0095 (7)	0.0077 (7)
C13	0.0294 (9)	0.0203 (8)	0.0178 (8)	0.0068 (7)	0.0044 (7)	0.0042 (7)
C14	0.0243 (8)	0.0166 (8)	0.0237 (9)	0.0072 (6)	0.0085 (7)	0.0046 (7)
C15	0.0329 (10)	0.0327 (10)	0.0375 (10)	0.0167 (8)	0.0188 (8)	0.0147 (8)
C16	0.0280 (10)	0.0188 (8)	0.0366 (10)	0.0057 (7)	0.0058 (8)	0.0003 (8)
C17	0.0422 (11)	0.0195 (8)	0.0308 (10)	0.0119 (8)	0.0126 (8)	0.0094 (7)
Cl1	0.0323 (2)	0.0221 (2)	0.0243 (2)	0.01014 (16)	0.01102 (17)	0.01263 (17)
N1	0.0233 (7)	0.0167 (7)	0.0173 (7)	0.0053 (5)	0.0062 (6)	0.0048 (5)
N2	0.0277 (8)	0.0217 (7)	0.0188 (7)	0.0063 (6)	0.0046 (6)	0.0065 (6)
O1	0.0646 (9)	0.0198 (6)	0.0329 (7)	0.0160 (6)	0.0302 (7)	0.0104 (5)
O2	0.0353 (7)	0.0166 (6)	0.0177 (6)	0.0091 (5)	0.0069 (5)	0.0035 (5)
O3	0.0432 (7)	0.0261 (6)	0.0187 (6)	0.0131 (5)	0.0117 (5)	0.0075 (5)