Fig. 1.

The design of the spacer microchip. Both the top view and the side-view cross-section are shown. All dimensions are in mm. The microchip had a width of 2.00 mm, a length of 2.60 mm, and a thickness of 0.30 mm. The tolerances were ± 10 μm. The black area in the middle indicates the 50 nm thick silicon nitride (SiN) window. A patterned spacer is shown in dark grey, providing a flow channel over the SiN window.