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. Author manuscript; available in PMC: 2013 May 1.
Published in final edited form as: Sens Actuators A Phys. 2012 May 1;178:193–201. doi: 10.1016/j.sna.2012.02.029

Figure 8.

Figure 8

Plot of total mechanical angle scan range (difference between maximum and minimum angular position) as a function of driving voltage for two devices with actuator lengths of 300 μm and 500 μm.