U11	U22	U33	U12	U13	U23
C1	0.0178 (9)	0.0210 (11)	0.0193 (10)	−0.0002 (8)	0.0049 (7)	0.0032 (8)
C2	0.0213 (10)	0.0141 (10)	0.0233 (10)	0.0017 (8)	0.0030 (8)	0.0017 (8)
C3	0.0186 (10)	0.0169 (10)	0.0212 (10)	0.0034 (8)	0.0035 (7)	−0.0027 (8)
C4	0.0146 (9)	0.0157 (10)	0.0157 (9)	0.0002 (7)	0.0023 (7)	−0.0015 (8)
C5	0.0159 (9)	0.0139 (10)	0.0171 (9)	0.0013 (7)	0.0025 (7)	−0.0013 (8)
C6	0.0181 (9)	0.0186 (11)	0.0197 (10)	0.0026 (8)	0.0061 (7)	0.0007 (8)
C7	0.0167 (9)	0.0152 (10)	0.0124 (9)	0.0013 (7)	0.0029 (7)	−0.0020 (7)
C8	0.0157 (9)	0.0164 (10)	0.0178 (9)	0.0042 (8)	0.0056 (7)	0.0035 (8)
C9	0.0192 (10)	0.0170 (11)	0.0223 (10)	0.0011 (8)	0.0065 (8)	0.0017 (8)
C10	0.0261 (11)	0.0204 (11)	0.0258 (11)	0.0076 (9)	0.0109 (8)	0.0006 (9)
C11	0.0168 (10)	0.0330 (13)	0.0273 (11)	0.0091 (9)	0.0076 (8)	0.0065 (10)
C12	0.0162 (10)	0.0372 (14)	0.0318 (12)	−0.0031 (9)	0.0001 (8)	−0.0023 (10)
C13	0.0224 (11)	0.0259 (12)	0.0270 (11)	−0.0004 (9)	0.0044 (8)	−0.0089 (9)
C14	0.0136 (9)	0.0176 (10)	0.0178 (9)	0.0003 (7)	0.0052 (7)	−0.0031 (8)
C15	0.0110 (8)	0.0165 (10)	0.0159 (9)	0.0035 (7)	0.0023 (7)	−0.0004 (8)
C16	0.0315 (11)	0.0263 (12)	0.0201 (10)	0.0063 (9)	0.0113 (8)	0.0000 (9)
Cl1	0.0333 (3)	0.0255 (3)	0.0325 (3)	0.0051 (2)	0.0179 (2)	0.0108 (2)
N1	0.0191 (8)	0.0146 (9)	0.0156 (8)	0.0026 (7)	0.0073 (6)	−0.0036 (7)
N2	0.0178 (8)	0.0125 (8)	0.0151 (8)	0.0032 (6)	0.0048 (6)	−0.0009 (6)
N3	0.0202 (8)	0.0142 (9)	0.0191 (8)	0.0019 (7)	0.0082 (6)	−0.0007 (7)
O1	0.0272 (7)	0.0124 (7)	0.0265 (8)	0.0044 (6)	0.0123 (6)	0.0029 (6)
O2	0.0210 (8)	0.0484 (11)	0.0283 (8)	−0.0117 (7)	0.0018 (6)	0.0130 (8)
O3	0.0296 (8)	0.0227 (8)	0.0402 (9)	−0.0017 (6)	0.0100 (7)	−0.0145 (7)
O4	0.0409 (9)	0.0502 (11)	0.0195 (8)	0.0005 (8)	0.0113 (6)	0.0093 (7)
O5	0.0319 (8)	0.0177 (8)	0.0434 (9)	0.0045 (6)	0.0071 (7)	0.0043 (7)
S1	0.0206 (2)	0.0146 (2)	0.0162 (2)	−0.00200 (19)	0.00691 (17)	−0.00031 (19)