Figure 20.

Template stripping of patterned surfaces. (a) An array of silver bumps from a FIB-patterned Si template. From (Nagpal, 2009) Reprinted with permission from AAAS. (b) Multilayer structures, here with silver and alumina, are also possible. From (Nagpal, 2009) Reprinted with permission from AAAS. (c) An array of periodic nanoholes in an optically thick Ag film, still on the silicon mold. Since the deposited film is discontinuous, nanoholes are formed. Reprinted with permission from (Im, 2011) Copyright 2011 American Chemical Society. (d) Patterned silver pyramid made from a Si template etched with KOH and patterned via FIB milling. Reprinted with permission from (Lindquist, 2010) Copyright 2010 American Chemical Society.