Table 2.
Parameters | Temperature (°C) | Pressure (mbar) | Oxygen flow (sccm) | Core-shell characteristic |
---|---|---|---|---|
| ||||
Samples | ||||
S0 | 400 | 100 | 0 | Poor/non-conformal |
S1 | 400 | 100 | 20 | Poor/non-conformal |
S2 | 400 | 100 | 50 | Good/conformal |
S3 | 400 | 100 | 80 | Ok/less-conformal |
S4 | 400 | 500 | 50 | Poor/non-conformal |