Table 1.

Parameters of Equation 2

Substrate	j	N	f
	(1015 cm−2 s−1)	(1015 cm−2)
Glass	2.00 ± 0.02	59.70 ± 3.0	0.59 ± 0.02
Si	2.16 ± 0.02	28.9 ± 7.5	0.92 ±0.02

Obtained by NLSQ fitting of measured dependences of the mean layer thickness on the deposition time (see Figure 1).