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. 2012 May 6;7(1):241. doi: 10.1186/1556-276X-7-241

Table 2.

Widths of gold signal calculated as central second moment of measured distribution (see Figure4)

Sputtering time
(s)
Glass substrate
Si substrate
σ
S
σ
S
(keV) (1015at.cm−2) (keV) (1015at.cm−2)
5
4.6
53
2.9
34
10
4.8
55
3.0
35
15
3.2
37
3.2
37
20 3.3 38 3.2 37

Typical statistical error is below 10 %.