Table 2.
Sputtering time (s) |
Glass substrate |
Si substrate |
||
---|---|---|---|---|
σ |
S |
σ |
S |
|
(keV) | (1015at.cm−2) | (keV) | (1015at.cm−2) | |
5 |
4.6 |
53 |
2.9 |
34 |
10 |
4.8 |
55 |
3.0 |
35 |
15 |
3.2 |
37 |
3.2 |
37 |
20 | 3.3 | 38 | 3.2 | 37 |
Typical statistical error is below 10 %.