Table 1. Statistical data for 20X (0.40 NA) and 40X (0.75 NA) objectives. Peak-to-Valley (PV), Root-Mean-Square (RMS), Strelh (S), Strehl after correcting first 14 Zernike’s (S(14)).

#	PV [µm]	RMS [µm]	S	S(14)
1	0.595	0.092	0.267	0.595
2	0.496	0.076	0.417	0.672
3	0.876	0.127	0.110	0.593
4	0.504	0.063	0.568	0.722
5	0.853	0.097	0.314	0.627
6	0.568	0.076	0.485	0.734
7	0.878	0.127	0.180	0.627
8	0.565	0.081	0.374	0.695
9	0.506	0.089	0.286	0.726
10	0.624	0.089	0.325	0.539
11	0.627	0.076	0.457	0.664
12	0.568	0.089	0.290	0.675
13	1.371	0.161	0.051	0.285
14	1.150	0.189	0.132	0.389
15	1.299	0.132	0.169	0.415
Mean	0.765	0.104	0.295	0.597