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Transmission spectra change as nanohole arrays made in Ag lms are exposed to UV ozone for 1, 4, 7, and 10 min (a) without a protective Al2O3 overlayer and (b) with a 20 nm-thick Al2O3 overlayer. The transmission through the Ag nanohole array without the Al2O3 layer rapidly degrades during the UV ozone process while the Al2O3 coated Ag nanohole array maintains its transmission spectrum for 10 min UV ozone process. Adapted from Im et al.31
