U11	U22	U33	U12	U13	U23
O1	0.0198 (2)	0.0200 (2)	0.0083 (2)	−0.00409 (19)	0.00179 (17)	0.00088 (17)
O2	0.0187 (3)	0.0334 (3)	0.0192 (3)	0.0069 (2)	−0.0042 (2)	−0.0018 (2)
O3	0.0242 (3)	0.0162 (2)	0.0131 (2)	0.0013 (2)	−0.00347 (19)	−0.00439 (18)
O4	0.0146 (2)	0.0138 (2)	0.0126 (2)	−0.00304 (16)	0.00192 (16)	0.00182 (17)
O5	0.0119 (2)	0.0149 (2)	0.0124 (2)	0.00174 (16)	−0.00052 (16)	−0.00358 (16)
C1	0.0258 (4)	0.0206 (3)	0.0086 (3)	−0.0017 (3)	0.0007 (2)	−0.0008 (2)
C2	0.0138 (3)	0.0127 (3)	0.0085 (2)	0.0004 (2)	0.00115 (19)	0.00019 (19)
C3	0.0145 (3)	0.0166 (3)	0.0101 (2)	−0.0037 (2)	0.0003 (2)	0.0000 (2)
C4	0.0137 (3)	0.0161 (3)	0.0092 (2)	−0.0031 (2)	−0.0005 (2)	−0.0003 (2)
C5	0.0116 (2)	0.0115 (2)	0.0089 (2)	0.00015 (19)	0.00017 (19)	0.00024 (19)
C6	0.0130 (3)	0.0134 (3)	0.0103 (2)	−0.0016 (2)	−0.00051 (19)	−0.0007 (2)
C7	0.0144 (3)	0.0146 (3)	0.0092 (2)	−0.0012 (2)	−0.0010 (2)	−0.0008 (2)
C8	0.0113 (2)	0.0122 (2)	0.0095 (2)	−0.00026 (19)	0.00045 (19)	0.00068 (19)
C9	0.0119 (2)	0.0110 (2)	0.0093 (2)	0.00007 (19)	0.00030 (19)	−0.00021 (19)
C10	0.0143 (3)	0.0119 (2)	0.0106 (2)	−0.0004 (2)	0.0003 (2)	−0.0001 (2)
C11	0.0182 (3)	0.0133 (3)	0.0145 (3)	0.0032 (2)	−0.0021 (2)	−0.0012 (2)
C12	0.0130 (3)	0.0175 (3)	0.0164 (3)	0.0025 (2)	−0.0017 (2)	−0.0023 (2)
C13	0.0128 (3)	0.0165 (3)	0.0119 (3)	0.0010 (2)	−0.0021 (2)	−0.0016 (2)
C14	0.0110 (2)	0.0116 (2)	0.0107 (2)	−0.00030 (19)	0.00070 (19)	−0.00083 (19)
C15	0.0111 (3)	0.0117 (2)	0.0114 (2)	−0.00005 (19)	0.00047 (19)	−0.0001 (2)
C16	0.0159 (3)	0.0133 (3)	0.0143 (3)	0.0013 (2)	0.0031 (2)	−0.0016 (2)
C17	0.0165 (3)	0.0179 (3)	0.0173 (3)	0.0049 (2)	0.0041 (2)	0.0010 (2)
C18	0.0232 (3)	0.0223 (3)	0.0176 (3)	0.0103 (3)	0.0031 (3)	0.0032 (3)
C19	0.0157 (3)	0.0199 (3)	0.0133 (3)	0.0047 (2)	0.0021 (2)	0.0039 (2)
C20	0.0130 (3)	0.0132 (3)	0.0103 (2)	0.0011 (2)	0.0019 (2)	0.0011 (2)