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Optical microscope images of the released arrays with medium-size pixels showing (a) the front side and (b) the back side of the device. Open trenches for nutrient flow can be seen as the dark lines between the pixels. The yellow lines within each pixel are the polysilicon filled trenches. The colour difference within each pixel is due to the different thickness of oxide: ~500 nm inside the trenches compared to 100 nm over the rest of the back surface.
