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Relative content and chemical states of carbon and nitrogen on silane surfaces. Surface types include clean silicon (Si), PEGSi, ablated PEGSi monolayer (ablPEGSi), DETA, PEGSi reacted onto DETA monolayer (DETA-PEGSi), DETA reacted onto an ablated PEGSi monolayer (ablPEGSi-DETA), and DETA reacted onto an unablated PEGSi monolayer (PEGSi-DETA).