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. 2011 May 10;29(3):032001. doi: 10.1116/1.3581102

Figure 1.

Figure 1

SEM images of postprocessed magnets fabricated by a problematic batch fabrication approach, as outlined in Fig. 2 of Ref. 16. In this report, we will discuss an alternative method that significantly improves the magnet yield. (a) The integrated magnets of Ref. 16 overhang the leading edge of 200-μm-long cantilevers. (b) Less than 1% of the fabricated magnets survived processing. Two common damage scenarios observed after processing were (c) complete magnet absence or (d) substantial magnet damage at the leading edge. The scale bar represents 20μm in (a) and 200 nm in (b)–(d).