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. 2011 Jun 30;2(2):122–134. doi: 10.5491/SHAW.2011.2.2.122

Table 4.

Results of airborne measurement of chemicals (2002-2007)

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All the chemicals were measured during 8 working hour for a full time shift.

Unit: parts per million (PPM) for gases except AsH3, alcohols and glycols and hydrofluoric acid, parts per billion (PPB) for AsH3, mg/m3 for and metals and acid-bases except hydrofluoric acid, OEL: occupational exposure limit of Korea for 8 hour working time.

GM: geometric mean, ND: non-detectable, Cl2: chloride, O3: ozone, CO2: carbon dioxide, NO: nitrogen monoxide, AsH3: Arsin, PH3: phosphine, CO: carbon monoxide, NH3: ammonia, HCL: Hydrochloric acid, H2O2: hydrogen peroxide, HF: hydrofluoric acid, HBr: hydrobromic acid, H2SO4: sulfuric acid (Group 1 carcinogen in International Agency of Research on Cancer), HNO3: nitric acid, KOH: Potassium hydroxide, H3PO4: phosphoric acid, AA: acetic acid, IPA: isopropyl alcohol, EG: ethylene glycol, Cu: copper, Pb: lead, Sn: Tin.

*Lower than 10% of OEL.

10-50% of OEL.

Ceiling limit.