Table 4.
All the chemicals were measured during 8 working hour for a full time shift.
Unit: parts per million (PPM) for gases except AsH3, alcohols and glycols and hydrofluoric acid, parts per billion (PPB) for AsH3, mg/m3 for and metals and acid-bases except hydrofluoric acid, OEL: occupational exposure limit of Korea for 8 hour working time.
GM: geometric mean, ND: non-detectable, Cl2: chloride, O3: ozone, CO2: carbon dioxide, NO: nitrogen monoxide, AsH3: Arsin, PH3: phosphine, CO: carbon monoxide, NH3: ammonia, HCL: Hydrochloric acid, H2O2: hydrogen peroxide, HF: hydrofluoric acid, HBr: hydrobromic acid, H2SO4: sulfuric acid (Group 1 carcinogen in International Agency of Research on Cancer), HNO3: nitric acid, KOH: Potassium hydroxide, H3PO4: phosphoric acid, AA: acetic acid, IPA: isopropyl alcohol, EG: ethylene glycol, Cu: copper, Pb: lead, Sn: Tin.
*Lower than 10% of OEL.
†10-50% of OEL.
‡Ceiling limit.