U11	U22	U33	U12	U13	U23
S1	0.0759 (7)	0.0645 (6)	0.0512 (5)	−0.0047 (6)	0.0066 (5)	−0.0030 (5)
O1	0.112 (2)	0.0531 (16)	0.097 (2)	0.0023 (16)	−0.0265 (17)	−0.0057 (15)
O2	0.141 (3)	0.080 (2)	0.112 (3)	0.012 (2)	−0.051 (2)	−0.016 (2)
O3	0.090 (2)	0.0805 (18)	0.0591 (15)	−0.0076 (15)	0.0199 (14)	−0.0167 (14)
O4	0.099 (2)	0.0790 (18)	0.0618 (16)	0.0104 (16)	−0.0146 (15)	0.0079 (14)
N1	0.083 (3)	0.060 (2)	0.062 (2)	0.0034 (19)	−0.0070 (19)	0.0035 (18)
N2	0.081 (2)	0.0598 (18)	0.075 (2)	−0.0124 (17)	0.0241 (19)	−0.0180 (17)
N3	0.066 (2)	0.068 (2)	0.0573 (19)	−0.0040 (17)	−0.0016 (16)	0.0028 (16)
N4	0.065 (2)	0.068 (2)	0.062 (2)	−0.0039 (17)	0.0091 (17)	−0.0125 (17)
C1	0.066 (3)	0.062 (3)	0.074 (3)	−0.001 (2)	0.005 (2)	−0.007 (2)
C2	0.071 (3)	0.057 (2)	0.077 (3)	−0.002 (2)	−0.001 (2)	−0.019 (2)
C3	0.079 (3)	0.070 (3)	0.086 (3)	0.003 (2)	−0.010 (3)	−0.015 (3)
C4	0.090 (4)	0.073 (3)	0.109 (4)	−0.009 (3)	−0.010 (3)	−0.029 (3)
C5	0.084 (3)	0.059 (3)	0.110 (4)	−0.011 (2)	0.009 (3)	−0.017 (3)
C6	0.080 (3)	0.059 (3)	0.093 (3)	−0.006 (2)	0.016 (3)	0.000 (2)
C7	0.071 (3)	0.062 (3)	0.077 (3)	0.003 (2)	0.009 (2)	0.005 (2)
C8	0.068 (3)	0.051 (2)	0.051 (2)	−0.003 (2)	−0.0007 (19)	0.0017 (19)
C9	0.076 (3)	0.051 (2)	0.073 (3)	0.009 (2)	−0.002 (2)	−0.004 (2)
C10	0.072 (3)	0.055 (2)	0.069 (2)	0.008 (2)	−0.007 (2)	−0.002 (2)
C11	0.061 (2)	0.047 (2)	0.049 (2)	−0.0016 (18)	0.0038 (17)	0.0042 (17)
C12	0.086 (3)	0.048 (2)	0.056 (2)	0.006 (2)	0.013 (2)	−0.002 (2)
C13	0.076 (3)	0.060 (2)	0.060 (2)	0.015 (2)	−0.001 (2)	0.005 (2)
C14	0.061 (3)	0.066 (3)	0.057 (2)	−0.008 (2)	0.002 (2)	−0.008 (2)
C15	0.061 (3)	0.087 (3)	0.051 (2)	−0.006 (2)	−0.004 (2)	0.006 (2)
C16	0.071 (3)	0.091 (3)	0.057 (2)	0.001 (2)	0.009 (2)	−0.004 (2)
C17	0.068 (3)	0.081 (3)	0.056 (2)	0.002 (2)	−0.002 (2)	−0.004 (2)
C18	0.106 (4)	0.088 (3)	0.083 (3)	0.011 (3)	0.017 (3)	−0.018 (3)
C19	0.095 (4)	0.104 (3)	0.077 (3)	−0.013 (3)	0.018 (2)	0.023 (3)