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Physical parameters of the materials for guide layer and substrate.
| Materials | Shear Velocity (m/s) | Density (kg/m3) | Polarity of Temperature Coefficient |
|---|---|---|---|
|
| |||
| 64efficien3 | 4,608 | 4,700 | - |
| 41efficien3 | 4,792 | ||
|
| |||
| 3600ficien3 | 4,202 | 7,450 | - |
|
| |||
| ST-90ic quartz | 5,060 | 2,650 | + |
| 36artquartz | 5,100 | ||
|
| |||
| SiO2 | 2,850 | 2,650 | + |
|
| |||
| PMMA | 1,100 | 1,140 | - |
|
| |||
| SU-8 | 1,810 | 1,190 | - |
