Table 2.

The temperature-dependent parameters of the substrate and guide layers [11,19,20].

Materials	Parameters	X0 at reference temperature of T0	α1 (10−4)	α2 (10−7)
Quartz	c11(1011 N/m2)	0.8674	−0.443	−4.07
T0 = 20 °C	c12(1011 N/m2)	0.0699	−29.3	72.45
	c13(1011 N/m2)	0.1191	−4.92	−5.96
	c14(1011 N/m2)	−0.1791	0.98	−0.13
	c33(1011 N/m2)	1.072	−1.88	−14.12
	c44(1011 N/m2)	0.5794	−1.72	−2.25
	c66(1011 N/m2)	0.3988	1.8	2.01
	ρ(103 kg/m3)	2.65	−0.3492	−0.159
	e11(C/m2)	0.171
	e14(C/m2)	0.0403
	ε11(10−11 F/m2)	3.997
	ε33(10−11 F/m2)	4.103
	α11(10−6 /°C)	13.71
	α33(10−6 /°C)	7.48
SiO2	ρ(103 kg/m3)	2.2
T0 = 25 °C	μ(1011 N/m2)	0.3121	1.4553
	ε11(10−11 F/m2)	3.8265	0.2628
SU-8	ρ(103 kg/m3)	1.2152	−4.5142	1.3302
T0 = 25 °C	μ(1011 N/m2)	0.011769		83.3139
	ε11(10−11 F/m2)	2.6563	−37.757