Table 3.
Design parameters of the fabricated devices.
| Device # | SiO2 Thickness (μm) | SU-8 Thickness (μm)/(h/λ) |
|---|---|---|
| 1 | 0.21 | 0.9/0.032 |
| 2 | 0.21 | 0.1/0.0035 |
| 3 | 0.21 | 0.8/0.028 |
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