Figure 3.

Co-containing nanocrystals on Ge{001} (FoV: 1 μm) (a) High-resolution ET image obtained with a PE of 34.6 keV and an ion dose of 1.05 × 10¹⁶ cm⁻². Aligned Co-containing nanocrystals are visible. The average extent of the crystals is between 10 nm and 60 nm laterally with a height of around 5 nm. (b) BSHe image obtained under normal incident with a PE of 10 keV and an ion dose of 1.05 × 10¹⁶ cm⁻². The Co-containing nanocrystals are clearly visible. (c) BSHe image recorded under identical conditions as used in (b) but with an incident angle of 10°. Reprinted from [10], copyright (2012) with permission from Elsevier.