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. 2012 Aug 29;3:597–619. doi: 10.3762/bjnano.3.70

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Copyright © 2012, Huth et al.

This is an Open Access article under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (https://www.beilstein-journals.org/bjnano/terms)

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Illustration of FEBID. Precursor molecules (here: organometallic complex; blue: metal, green: organic ligands) are supplied by a gas-injection system and physisorb (1) on the surface. Surface diffusion (2), thermally induced desorption (3) and electron-stimulated desorption (3') take place. Within the focus of the electron beam, adsorbed precursor molecules are (partly) dissociated followed by desorption of volatile organic ligands (4). Upper right: For pattern definition the electron beam is moved in a raster fashion (here: serpentine) over the surface and settles on each dwell point for a specified dwell time. After one raster sequence is completed the process is repeated until a predefined number of repeated loops is reached.