Figure 16.
Left: Strain-resistance effect of a Pt–C nanogranular sensor element measured on a test cantilever (see inset). The sensor elements were prepared by FEBID employing the precursor Me3Pt(IV)CpMe at 5 keV beam energy, 1.6 nA beam current, 20 nm pitch and 1 μs dwell time. Within a full Wheatstone bridge each individual sensor element had a resistance of 51 kΩ. The Si (100) test cantilever had dimensions of 70 × 35 × 3 μm3. Right: Exemplary AFM image of collagen fibril taken in noncontact mode at a resonance frequency of 420 kHz. The images were taken with an adapted MultiMode atomic force microscope with Nanoscope 3a controller at 0.2 Hz line rate.