Figure 2.

Single-species growth rate calculated for the precursor Me₃Pt(IV)CpMe assuming three different electron-flux values as indicated. The flux values correspond to beam currents of approximately 0.1, 1 and 10 nA with a beam diameter of 20 nm. The model parameters σ = 2.2 × 10⁻² nm² [23] and τ = 29 μs [24] were used. The effective precursor flux was set to sJ = 1.5 × 10³ (nm²s)⁻¹.