Table 1.

Electron–molecule interaction processes relevant for FEBID according to [3]. Rotational excitations are not explicitly included. E_i: initial kinetic energy of electron, E_r: residual kinetic energy of electron after process.

	process type
e−(Ei) + AB → AB + e−(Ei)	elastic scattering
e−(Ei) + AB → AB(ν) + e−(Er)	vibrational excitation (VE)
e−(Ei) + AB → AB* + e−(Er)	electronic excitation (EE)
e− + AB → A• + B−	dissociative electron attachment (DEA)
e− + AB → A• + B• + e−	neutral dissociation (ND)
e− + AB → A• + B+ + 2e−	dissociative ionization (DI)
e− + AB → A− + B+ + e−	bipolar dissociation / ion pair formation (BD)