Table 3.

Composition of nonvolatile dissociation products from the individual precursors Co₂(CO)₈ and Me₃Pt(IV)CpMe on Si/SiO₂ substrates at 5 keV beam energy, 1.6 nA beam current (measured at Faraday cup), 20 nm pitch and 1 μs dwell time.

	[Co]i	[Pt]i	[C]i	[O]i
dissociation product precursor 1: Co2(CO)8	0.75	0.0	0.17	0.08
dissociation product precursor 2: Me3Pt(IV)CpMe	0.0	0.22	0.78	0.0