Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
The effect of stage velocity on the stage position error (triangles) and the coefficient of variation of the stage velocity (circles). Below a stage velocity of 3 mm s−1, the position error dramatically increases as the linear motor goes into a stepwise mode of operation.
