Table 2.

Dimensions (μm), resistance (Ω), and resistivity (Ω·m) of the three patterns

	Th (μm)	W(μm)	L(μm)	R(Ω) at 30°C	ρ(Ω·m) at 30°C
W10	0.94	9.4	1,100	4.053	3.26 × 10−8
W30	0.94	29.5	1,100	1.307	3.30 × 10−8
W50	0.94	49	1,100	0.796	3.33 × 10−8

Th, thickness; W, width; L, length. From the resistance (R) measurement, resistivity (ρ) is calculated.